Adisorn Buranawong. 2010. Deposition of titanium aluminium nitride thin film by reactive unbalanced magnetron sputtering method. Department of Physics, King Mongkut's University of Technology Thonburi; DOI : https://doi.nrct.go.th/ListDoi/listDetail?Resolve_DOI=10.14457/KMUTT.the.2010.16

Adisorn Buranawong. Deposition of titanium aluminium nitride thin film by reactive unbalanced magnetron sputtering method. . Bangkok:King Mongkut's University of Technology Thonburi, 2010. DOI : https://doi.nrct.go.th/ListDoi/listDetail?Resolve_DOI=10.14457/KMUTT.the.2010.16

Adisorn Buranawong. (2010) Deposition of titanium aluminium nitride thin film by reactive unbalanced magnetron sputtering method . King Mongkut's University of Technology Thonburi/Bangkok. DOI : https://doi.nrct.go.th/ListDoi/listDetail?Resolve_DOI=10.14457/KMUTT.the.2010.16